Lamb wave propagation in monocrystalline silicon wafers

Fromme, Paul (Department of Mechanical Engineering, University College London, London, United Kingdom) ; Pizzolato, Marco (School of Engineering and Architecture (HEIA-FR), HES-SO // University of Applied Sciences Western Switzerland) ; Robyr, Jean-Luc (School of Engineering and Architecture (HEIA-FR), HES-SO // University of Applied Sciences Western Switzerland) ; Masserey, Bernard (School of Engineering and Architecture (HEIA-FR), HES-SO // University of Applied Sciences Western Switzerland)

Monocrystalline silicon wafers are widely used in the photovoltaic industry for solar panels with high conversion efficiency. Guided ultrasonic waves offer the potential to efficiently detect microcracks in the thin wafers. Previous studies of ultrasonic wave propagation in silicon focused on effects of material anisotropy on bulk ultrasonic waves, but the dependence of the wave propagation characteristics on the material anisotropy is not well understood for Lamb waves. The phase slowness and beam skewing of the two fundamental Lamb wave modes A0 and S0 were investigated. Experimental measurements using contact wedge transducer excitation and laser measurement were conducted. Good agreement was found between the theoretically calculated angular dependency of the phase slowness and measurements for different propagation directions relative to the crystal orientation. Significant wave skew and beam widening was observed experimentally due to the anisotropy, especially for the S0 mode. Explicit finite element simulations were conducted to visualize and quantify the guided wave beam skew. Good agreement was found for the A0 mode, but a systematic discrepancy was observed for the S0 mode. These effects need to be considered for the non-destructive testing of wafers using guided waves.


Keywords:
Article Type:
scientifique
Faculty:
Ingénierie et Architecture
School:
HEIA-FR
Institute:
SeSi - Institut de Systèmes d'ingénierie durables
Subject(s):
Ingénierie
Date:
2018-01
Pagination:
9 p.
Published in:
The Journal of the Acoustical Society of America
Numeration (vol. no.):
2018, 143, 1, pp. 287-295
DOI:
ISSN:
0001-4966
Appears in Collection:

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 Record created 2018-10-17, last modified 2018-12-20

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