Multi-beam RF accelerators for ion implantation

Seidl, Peter A. (Lawrence Berkeley National Laboratory Berkeley, CA, USA) ; Persaud, Arun (Lawrence Berkeley National Laboratory Berkeley, CA, USA) ; Di Domenico, Diego (School of Engineering and Architecture (HEIA-FR), HES-SO // University of Applied Sciences Western Switzerland) ; Andreasson, Johan (Airity Technologies, Inc. Redwood City, CA, USA) ; Ji, Qing (Lawrence Berkeley National Laboratory Berkeley, CA, USA) ; Liang, Wei (Airity Technologies, Inc. Redwood City, CA, USA) ; Ni, Di (SonicMEMS Laboratory Cornell University Ithaca, NY, USA) ; Oberson, Daniel (School of Engineering and Architecture (HEIA-FR), HES-SO // University of Applied Sciences Western Switzerland) ; Raymond, Luke (Airity Technologies, Inc. Redwood City, CA, USA) ; Scharfstein, Gregory (Lawrence Berkeley National Laboratory Berkeley, CA, USA) ; Todd, Alan M. M. (AMMTodd Consulting Princeton Junction, NJ, USA) ; Lal, Amit (SonicMEMS Laboratory Cornell University Ithaca, NY, USA) ; Schenkel, Thomas (Lawrence Berkeley National Laboratory Berkeley, CA, USA)

We report on the development of a radio frequency (RF) linear accelerator (linac) for multiple-ion beams that is made from stacks of low cost wafers. The accelerator lattice is comprised of RF-acceleration gaps and electrostatic quadrupole focusing elements that are fabricated on 4” wafers made from printed circuit board or silicon. We demonstrate ion acceleration with an effective gradient of about 0.5MV m−1 with an array of 3 × 3 beams. The total ion beam energies achieved to date are in the 10 keV range with total ion currents in tests with noble gases of ∼0.1 mA. We discuss scaling of the ion energy (by adding acceleration modules) and ion currents (with more beams) for applications of this multi-beam RF linac technology to ion implantation and surface modification of materials.


Keywords:
Article Type:
scientifique
Faculty:
Ingénierie et Architecture
School:
HEIA-FR
Institute:
iSIS - Institut des systèmes intelligents et sécurisés
Subject(s):
Ingénierie
Date:
2018-09
Pagination:
4 p.
Published in:
Arxiv.org
External resources:
Appears in Collection:



 Record created 2018-10-30, last modified 2018-12-20

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