Simulation and experimental characterizations of a thin touch mode capacitive pressure sensor

El Guamra, Adyl Michaël (School of Engineering, Architecture and Landscape (hepia), HES-SO // University of Applied Sciences Western Switzerland) ; Bühlmann, Damien (School of Engineering, Architecture and Landscape (hepia), HES-SO // University of Applied Sciences Western Switzerland) ; Moreillon, Fabien (School of Engineering, Architecture and Landscape (hepia), HES-SO // University of Applied Sciences Western Switzerland) ; Vansteenkiste, Luc (School of Engineering, Architecture and Landscape (hepia), HES-SO // University of Applied Sciences Western Switzerland) ; Büchler, Philippe (Institute for Surgical Technology & Biomechanics, University of Bern, Bern, Switzerland) ; Stahel, Andreas (Bern University of Applied Sciences (BFH) Engineering and Information Technology, Biel, Switzerland) ; Passeraub, Philippe (School of Engineering, Architecture and Landscape (hepia), HES-SO // University of Applied Sciences Western Switzerland)

This study describes a thin and lowcost capacitive pressure sensor and a model elaborated by the finite element method (FEM) in touch mode for monitoring fluid pressure from 0 to 40kPa in a perfusion chamber with Luer fittings for medical applications. The touch mode is expected to provide good linearity, large measuring range and large overload protection [1]. The choice of a thin polymer membrane as sensitive element with a printed circular electrode reduces drastically the thickness and fabrication costs in comparison to standard microfabrication processes. A set of assumptions were successfully applied to reduce the computation time of the model which was validated by comparison with experiments. The principle, characteristics and a methodology of FEM model for a specific touch mode capacitive-type pressure sensor are illustrated in the report.


Keywords:
Conference Type:
full paper
Faculty:
Ingénierie et Architecture
School:
HEPIA - Genève
Institute:
inSTI - Institut des Sciences et Technologies industrielles
Publisher:
Grenoble, France, 14-16 October 2015
Date:
2015-10
Grenoble, France
14-16 October 2015
Pagination:
7 p.
Published in:
Proceedings of COMSOL Conference 2015, 14-16 October 2015, Grenoble, France
External resources:
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 Record created 2020-03-13, last modified 2020-10-27

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