Improving the resolution of interference microscopes

Jobin, Marc (School of Engineering, Architecture and Landscape (hepia), HES-SO // University of Applied Sciences Western Switzerland) ; Foschia, Raphael (School of Engineering, Architecture and Landscape (hepia), HES-SO // University of Applied Sciences Western Switzerland)

We have made an interference optical microscope (IOM) capable of improved resolutions, both vertically and laterally. Atomic steps of graphite have been imaged in phase shift mode (PSM) at large field of view through a proper averaging time during acquisition. We discuss the influence of the illumination and the CCD resolution on the ultimate achievable vertical resolution. To improve the lateral resolution, we report on the integration of the IOM to an atomic force microscope (AFM) in order to take advantage of the 2 nm resolution provided by AFM.


Keywords:
Article Type:
scientifique
Faculty:
Ingénierie et Architecture
School:
HEPIA - Genève
Institute:
inSTI - Institut des Sciences et Technologies industrielles
Date:
2008-10
Pagination:
8 p.
Published in:
Measurement
Numeration (vol. no.):
2008, vol.41, no. 8, pp. 896-903
DOI:
ISSN:
0263-2241
Appears in Collection:

Note: The status of this file is: restricted


 Record created 2020-04-17, last modified 2020-05-08

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