Absolute thickness imaging of PMMA layer on corrugated transparent substrate by scanning white light interference microscope
2006
Einzelheiten
Titel
Absolute thickness imaging of PMMA layer on corrugated transparent substrate by scanning white light interference microscope
Autor(en)/ in(nen)
Jobin, Marc (School of Engineering, Architecture and Landscape (hepia), HES-SO University of Applied Sciences Western Switzerland)
Foschia, Raphael (School of Engineering, Architecture and Landscape (hepia), HES-SO University of Applied Sciences Western Switzerland)
Foschia, Raphael (School of Engineering, Architecture and Landscape (hepia), HES-SO University of Applied Sciences Western Switzerland)
Datum
2006-07
Veröffentlich in
Microscopy and Microanalysis
Band
2006, no.12, supp. no. 2, pp. 1774-1775
Umfang
2 p.
ISSN
1431-9276
Artikeltyp
scientifique
Domaine
Ingénierie et Architecture
Ecole
HEPIA - Genève
Institut
inSTI - Institut des Sciences et Technologies industrielles
Fussnote
Extended abstract of a paper presented at Microscopy and Microanalysis 2006 in Chicago, Illinois, USA, July 30 – August 3, 2006
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