Absolute thickness imaging of PMMA layer on corrugated transparent substrate by scanning white light interference microscope
2006
Détails
Titre
Absolute thickness imaging of PMMA layer on corrugated transparent substrate by scanning white light interference microscope
Auteur(s)/ trice(s)
Jobin, Marc (School of Engineering, Architecture and Landscape (hepia), HES-SO University of Applied Sciences Western Switzerland)
Foschia, Raphael (School of Engineering, Architecture and Landscape (hepia), HES-SO University of Applied Sciences Western Switzerland)
Foschia, Raphael (School of Engineering, Architecture and Landscape (hepia), HES-SO University of Applied Sciences Western Switzerland)
Date
2006-07
Publié dans
Microscopy and Microanalysis
Volume
2006, no.12, supp. no. 2, pp. 1774-1775
Pagination
2 p.
ISSN
1431-9276
Type d'article
scientifique
Domaine
Ingénierie et Architecture
Ecole
HEPIA - Genève
Institut
inSTI - Institut des Sciences et Technologies industrielles
Note
Extended abstract of a paper presented at Microscopy and Microanalysis 2006 in Chicago, Illinois, USA, July 30 – August 3, 2006
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