Absolute thickness imaging of PMMA layer on corrugated transparent substrate by scanning white light interference microscope
2006
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Title
Absolute thickness imaging of PMMA layer on corrugated transparent substrate by scanning white light interference microscope
Author(s)
Jobin, Marc (School of Engineering, Architecture and Landscape (hepia), HES-SO University of Applied Sciences Western Switzerland)
Foschia, Raphael (School of Engineering, Architecture and Landscape (hepia), HES-SO University of Applied Sciences Western Switzerland)
Foschia, Raphael (School of Engineering, Architecture and Landscape (hepia), HES-SO University of Applied Sciences Western Switzerland)
Date
2006-07
Published in
Microscopy and Microanalysis
Volume
2006, no.12, supp. no. 2, pp. 1774-1775
Pagination
2 p.
ISSN
1431-9276
Article Type
scientifique
Faculty
Ingénierie et Architecture
School
HEPIA - Genève
Institute
inSTI - Institut des Sciences et Technologies industrielles
Note
Extended abstract of a paper presented at Microscopy and Microanalysis 2006 in Chicago, Illinois, USA, July 30 – August 3, 2006
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