Nanometrology for MEMS : combination of optical interference, atomic force microscopy, and nanoindentor-based actuator

Jobin, Marc (School of Engineering, Architecture and Landscape (hepia), HES-SO // University of Applied Sciences Western Switzerland) ; Passeraub, Philippe (School of Engineering, Architecture and Landscape (hepia), HES-SO // University of Applied Sciences Western Switzerland) ; Foschia, Raphael (School of Engineering, Architecture and Landscape (hepia), HES-SO // University of Applied Sciences Western Switzerland)

We show the integration of a home-made interference optical microscope (IOM) with an Atomic force microscope, as well as the combination of IOM with a nanoindentor. Such combined instruments have many applications in the characterisation of MEMS/NEMS. As an illustrative example, we have used a MEMS accelerometer with capacitive read-out. Surface topography and defects have been measured with an IOM/AFM setup, as well as the bending and the torsion of the inertial mass while a calibrated force is applied with the nanoindentor probe on an off-axis location of the inertial mass.


Conference Type:
full paper
Faculty:
Ingénierie et Architecture
School:
HEPIA - Genève
Institute:
inSTI - Institut des Sciences et Technologies industrielles
Publisher:
Strasbourg, France, 28 April 2006
Date:
2006-04
Strasbourg, France
28 April 2006
Pagination:
x p.
Published in:
Optical Micro- and Nanometrology in Microsystems Technology
DOI:
ISSN:
0277-786X
Appears in Collection:



 Record created 2020-05-08, last modified 2020-05-08


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