Inegrated optical profiler and AFM : a 3D metrology system for nanotechnology

Du, A. (School of Engineering, Architecture and Landscape (hepia), HES-SO // University of Applied Sciences Western Switzerland) ; Jobin, Marc (School of Engineering, Architecture and Landscape (hepia), HES-SO // University of Applied Sciences Western Switzerland ; NanoFeel, Carouge, Switzerland) ; Foschia, Raphaël (NanoFeel, Carouge, Switzerland)

A white light interference optical profiler (WL-IOP) operating in the vertical scanning interferometry (VSI) mode has been home-made developed and integrated into a commercial Atomic Force Microscope (AFM). The result is a 3D metrological tool operating with sub-nanometer resolution vertically over a wide range laterally: from 1mm down to 10nm. This is a faster and in many case a higher performance alternative to the more standard stylus profiler / AFM combination.


Keywords:
Conference Type:
short paper
Faculty:
Ingénierie et Architecture
School:
HEPIA - Genève
Institute:
inSTI - Institut des Sciences et Technologies industrielles
Publisher:
Anaheim, CA, USA, 8-12 May 2005
Date:
2005-05
Anaheim, CA, USA
8-12 May 2005
Pagination:
3 p.
Published in:
Proceedings of NSTI Nanotech, the Nanotechnology Conference and Trade Show, 8-12 May 2005, Anaheim, CA, USA
Numeration (vol. no.):
2005, vol. 2, chapter 11: Characterization Tools and Microscopy, pp. 695-697
ISBN:
0-9767985-0-6
External resources:
Appears in Collection:



 Record created 2020-05-15, last modified 2020-05-29

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