Inegrated optical profiler and AFM : a 3D metrology system for nanotechnology

Du, A. (School of Engineering, Architecture and Landscape (hepia), HES-SO // University of Applied Sciences Western Switzerland) ; Jobin, Marc (School of Engineering, Architecture and Landscape (hepia), HES-SO // University of Applied Sciences Western Switzerland ; NanoFeel, Carouge, Switzerland) ; Foschia, Raphaël (NanoFeel, Carouge, Switzerland)

A white light interference optical profiler (WL-IOP) operating in the vertical scanning interferometry (VSI) mode has been home-made developed and integrated into a commercial Atomic Force Microscope (AFM). The result is a 3D metrological tool operating with sub-nanometer resolution vertically over a wide range laterally: from 1mm down to 10nm. This is a faster and in many case a higher performance alternative to the more standard stylus profiler / AFM combination.


Mots-clés:
Type de conférence:
short paper
Faculté:
Ingénierie et Architecture
Ecole:
HEPIA - Genève
Institut:
inSTI - Institut des Sciences et Technologies industrielles
Adresse bibliogr.:
Anaheim, CA, USA, 8-12 May 2005
Date:
2005-05
Anaheim, CA, USA
8-12 May 2005
Pagination:
3 p.
Publié dans:
Proceedings of NSTI Nanotech, the Nanotechnology Conference and Trade Show, 8-12 May 2005, Anaheim, CA, USA
Numérotation (vol. no.):
2005, vol. 2, chapter 11: Characterization Tools and Microscopy, pp. 695-697
ISBN:
0-9767985-0-6
Ressource(s) externe(s):
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 Notice créée le 2020-05-15, modifiée le 2020-10-27

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