Résumé

A white light interference optical profiler (WL-IOP) operating in the vertical scanning interferometry (VSI) mode has been home-made developed and integrated into a commercial Atomic Force Microscope (AFM). The result is a 3D metrological tool operating with sub-nanometer resolution vertically over a wide range laterally: from 1mm down to 10nm. This is a faster and in many case a higher performance alternative to the more standard stylus profiler / AFM combination.

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