High resolution in interferometric microscopy

Jobin, Marc (School of Engineering, Architecture and Landscape (hepia), HES-SO // University of Applied Sciences Western Switzerland) ; Foschia, Raphael (School of Engineering, Architecture and Landscape (hepia), HES-SO // University of Applied Sciences Western Switzerland)

Interferometric optical microscopes (IOM) are very powerful 3D metrology tools which use integrated interferometers inside optical objectives. In Phase Shift Mode (PSM) [1], they can reach subnanometer vertical resolution but the lateral resolution, as any far-field optical system, is limited by diffraction to typically 0.5 um. They have a widespread use in microfabrication industries (microelectronics and MEMS).


Keywords:
Conference Type:
short paper
Faculty:
Ingénierie et Architecture
School:
HEPIA - Genève
Institute:
inSTI - Institut des Sciences et Technologies industrielles
Publisher:
Aachen, Germany, 1-5 September 2008
Date:
2008-09
Aachen, Germany
1-5 September 2008
Pagination:
1 p.
Published in:
Proceedings of EMC 14th European Microscopy Congress 1–5 September 2008, Aachen, Germany
Numeration (vol. no.):
pp. 745-746
DOI:
ISBN:
978-3-540-85154-7
Appears in Collection:



 Record created 2020-05-29, last modified 2020-06-26


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