Abstract

Interferometric optical microscopes (IOM) are very powerful 3D metrology tools which use integrated interferometers inside optical objectives. In Phase Shift Mode (PSM) [1], they can reach subnanometer vertical resolution but the lateral resolution, as any far-field optical system, is limited by diffraction to typically 0.5 um. They have a widespread use in microfabrication industries (microelectronics and MEMS).

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