Interferometric optical microscopes (IOM) are very powerful 3D metrology tools which use integrated interferometers inside optical objectives. In Phase Shift Mode (PSM) [1], they can reach subnanometer vertical resolution but the lateral resolution, as any far-field optical system, is limited by diffraction to typically 0.5 um. They have a widespread use in microfabrication industries (microelectronics and MEMS).
Title
High resolution in interferometric microscopy
Date
2008-09
Published in
Proceedings of EMC 14th European Microscopy Congress 1–5 September 2008, Aachen, Germany
Volume
pp. 745-746
Publisher
Aachen, Germany, 1-5 September 2008
Pagination
1 p.
Presented at
EMC 2008 14th European Microscopy Congress, Aachen, Switzerland, 2008-09-01, 2008-09-05
ISBN
978-3-540-85154-7
Paper type
short paper
Faculty
Ingénierie et Architecture
School
HEPIA - Genève
Institute
inSTI - Institut des Sciences et Technologies industrielles