MeV ion beam lithography of biocompatible halogenated parylenes using aperture masks

Whitlow, Harry J. (School of Engineering – HE-Arc Ingénierie, HES-SO // University of Applied Sciences Western Switzerland) ; Norarat, Rattanaporn (School of Engineering – HE-Arc Ingénierie, HES-SO // University of Applied Sciences Western Switzerland ; Faculty of Science and Agriculture, Rajamangala University of Technology Lanna, Chiand Rai, Thailand ; Department of Physics, University of Jyväskylä, Jyväskylä, Finland) ; Roccio, Marta (Inner Ear Research Laboratory, University Department of Otorhinolaryngology, Head and neck Surgery, Inselspital, Bern, Switzerland) ; Jeanneret, Patrick (School of Engineering – HE-Arc Ingénierie, HES-SO // University of Applied Sciences Western Switzerland) ; Guibert, Edouard (School of Engineering – HE-Arc Ingénierie, HES-SO // University of Applied Sciences Western Switzerland) ; Bergamin, Maxime (School of Engineering – HE-Arc Ingénierie, HES-SO // University of Applied Sciences Western Switzerland) ; Fiorucci, Gianni (School of Engineering – HE-Arc Ingénierie, HES-SO // University of Applied Sciences Western Switzerland) ; Kämpfer-Homsy, Alexandra (School of Engineering – HE-Arc Ingénierie, HES-SO // University of Applied Sciences Western Switzerland) ; Laux, Edith (School of Engineering – HE-Arc Ingénierie, HES-SO // University of Applied Sciences Western Switzerland) ; Keppner, Herbert (School of Engineering – HE-Arc Ingénierie, HES-SO // University of Applied Sciences Western Switzerland) ; Senn, Pascal (Inner Ear Research Laboratory, University Department of Otorhinolaryngology, Head and neck Surgery, Inselspital, Bern, Switzerland ; Department of Otolaryngology, Head and Neck Surgery, HUG, Geneva, Switzerland)

Parylenes are poly(p-xylylene) polymers that are widely used as moisture barriers and in biomedicine because of their good biocompatibility. We have investigated MeV ion beam lithography using 16O+ ions for writing defined patterns in Parylene-C, which is evaluated as a coating material for the Cochlear Implant (CI) electrode array, a neuroprosthesis to treat some forms of deafness. Parylene-C and -F on silicon and glass substrates as well as 50 μm thick PTFE were irradiated to different fluences (1 x 1013 - 1 x 1016 1 MeV16O+ ions cm−2) through aperture masks under high vacuum and a low pressure (<10−3 mbar) oxygen atmosphere. Biocompatibility of the irradiated and unirradiated surfaces was tested by cell-counting to determine the proliferation of murine spiral ganglion cells. The results reveal that an oxygen ion beam can be used to pattern Parylene-C and -F without using a liquid solvent developer in a similar manner to PTFE but with a ∼25× smaller removal rate. Biocompatibility tests showed no difference in cell adhesion between irradiated and unirradiated areas or ion fluence dependence. Coating the Parylene surface with an adhesion-promoting protein mixture had a much greater effect on cell proliferation.


Keywords:
Article Type:
scientifique
Faculty:
Ingénierie et Architecture
School:
HE-Arc Ingénierie
Institute:
Aucun institut
Date:
2015-07
Pagination:
3 p.
Published in:
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
Numeration (vol. no.):
2015, vol. 354, pp. 34-36
DOI:
ISSN:
0168-583X
Appears in Collection:

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 Record created 2020-06-30, last modified 2020-07-14

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