Absolute thickness imaging of PMMA layer on corrugated transparent substrate by scanning white light interference microscope

Jobin, Marc (School of Engineering, Architecture and Landscape (hepia), HES-SO // University of Applied Sciences Western Switzerland) ; Foschia, Raphael (School of Engineering, Architecture and Landscape (hepia), HES-SO // University of Applied Sciences Western Switzerland)

Note: Extended abstract of a paper presented at Microscopy and Microanalysis 2006 in Chicago, Illinois, USA, July 30 – August 3, 2006


Article Type:
scientifique
Faculty:
Ingénierie et Architecture
School:
HEPIA - Genève
Institute:
inSTI - Institut des Sciences et Technologies industrielles
Date:
2006-07
Pagination:
2 p.
Published in:
Microscopy and Microanalysis
Numeration (vol. no.):
2006, no.12, supp. no. 2, pp. 1774-1775
DOI:
ISSN:
1431-9276
Appears in Collection:



 Record created 2020-05-08, last modified 2020-05-08

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